Fast and accurated mueller matrix infrared ellipsometer
An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 um to 1000 µm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 um to 1000 µm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection. |
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