SUBSTRATE HOLDER
There is provided a substrate holder including: a ceramic base member; a plurality of electrodes and at least one conductive member embedded in the ceramic base member; a plurality of connecting parts electrically connecting the plurality of electrodes and the at least one conductive member such tha...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | There is provided a substrate holder including: a ceramic base member; a plurality of electrodes and at least one conductive member embedded in the ceramic base member; a plurality of connecting parts electrically connecting the plurality of electrodes and the at least one conductive member such that each of the at least one conductive member is connected to at least one of the plurality of electrodes; a plurality of terminals provided on at least one of the plurality of electrodes or the at least one conductive member. A resistance value between a connecting part connected to the at least one conductive member and a terminal provided on the at least one conductive member is smaller than a resistance value between both ends of each of the plurality of electrodes. The number of the plurality of terminals is smaller than two times the number of the plurality of electrodes. |
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