HIGH PRECISION NANOSCALE THIN FILM FABRICATION PROCESSES

A method for fabricating one or more elements in a multi-lens column. Drops of ultraviolet (UV)-curable liquid are dispensed by an inkjet on a substrate, which may be supported by a chuck. A non-uniform liquid film is then formed, such as by spreading and merging of the inkjetted drops. The film is then locally heated, such as by using a digital micromirror device array. The film is then cured by exposing it to UV light, where the cured film together with the substrate form an element of the multi-lens column. The substrate is then brought to a metrology station where optical metrology is performed on the cured film and the substrate for quality control.