Sample Display Method
A sample display method by means of a scanning electron microscope comprises at most one active objective lens located above a first scanning element and a second scanning element. A primary electron beam is deflected so as to be focused by an objective lens so that the beam propagates from the seco...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A sample display method by means of a scanning electron microscope comprises at most one active objective lens located above a first scanning element and a second scanning element. A primary electron beam is deflected so as to be focused by an objective lens so that the beam propagates from the second scanning element towards a sample approximately parallel to the SEM optical axis, wherein the sample is also tilted relative to the SEM optical axis by an angle other than 90°, or it is a sample with distinct topography. |
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