Micro-electromechanical Systems (MEMS) Directional Acoustic Sensors for Underwater Operation

A microelectromechanical system configured to be submerged in a fluid having an acoustic sensor assembly having a substrate, interdigitated comb finger capacitors, one or more sensor, a boot assembly a boot assembly having a cavity being configured to contain dielectric fluid and to enclose the acou...

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Bibliographische Detailangaben
Hauptverfasser:	ALVES, Fabio Durante Pereira, KARUNASIRI, Gamani
Format:	Patent
Sprache:	eng
Schlagworte:	ANALOGOUS ARRANGEMENTS USING OTHER WAVES DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES MEASURING PHYSICS RADIO DIRECTION-FINDING RADIO NAVIGATION TESTING
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Beschreibung
Zusammenfassung:	A microelectromechanical system configured to be submerged in a fluid having an acoustic sensor assembly having a substrate, interdigitated comb finger capacitors, one or more sensor, a boot assembly a boot assembly having a cavity being configured to contain dielectric fluid and to enclose the acoustic sensor assembly, where the acoustic sensor assembly is communicably coupled to the dielectric fluid and boot, the acoustic sensor assembly being configured to receive the one or more sound waves from a source through the boot and dielectric fluid with near unity acoustic transmission, and a flange assembly disposed at a top side of the boot assembly and configured to cover and seal the acoustic sensor assembly and the dielectric fluid in the boot assembly.