X-RAY INSPECTION APPARATUS, X-RAY INSPECTION SYSTEM, AND X-RAY INSPECTION METHOD

An X-ray inspection apparatus includes a transport unit configured to transport an article, an electromagnetic wave irradiation unit configured to irradiate the article with a first electromagnetic wave in a first energy band and a second electromagnetic wave in a second energy band, an electromagne...

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Bibliographische Detailangaben
Hauptverfasser:	YURUGI, Futoshi, YOSHIDA, Keisuke
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An X-ray inspection apparatus includes a transport unit configured to transport an article, an electromagnetic wave irradiation unit configured to irradiate the article with a first electromagnetic wave in a first energy band and a second electromagnetic wave in a second energy band, an electromagnetic wave sensor configured to detect the first electromagnetic wave and the second electromagnetic wave, and a control unit to which a detection result is input. The control unit is configured to generate a first transmission image based on a detection result of the first electromagnetic wave and a second transmission image based on a detection result of the second electromagnetic wave, to perform image processing including a subtraction process on the first transmission image and the second transmission image, and to determine whether or not a foreign material is included in the article on the basis of a difference image.