BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME

BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME

A backside illuminated image sensor includes a substrate having a frontside surface and a backside surface, a charge accumulation region disposed in the substrate, and a light isolation pattern surrounding at least a portion of the charge accumulation region and comprising a metal material. The subs...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: HAN, Chang Hun
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A backside illuminated image sensor includes a substrate having a frontside surface and a backside surface, a charge accumulation region disposed in the substrate, and a light isolation pattern surrounding at least a portion of the charge accumulation region and comprising a metal material. The substrate has a trench extending from the backside surface toward the frontside surface, and the light isolation pattern is disposed in the trench.