HEAD, HEAD MODULE, AND APPARATUS THAT DISCHARGES LIQUID

A head includes: a silicon substrate; an insulating film on the silicon substrate; an electrode wiring on the insulating film; a flexible wiring connected to the electrode wiring; and a conductive film electrically connects the flexible wiring and the electrode wiring in a bonding area. The silicon...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMANAKA, Kentaroh, SUGIOKA, Yuu, MASUDA, Toshiaki, USAMI, Hitoshi
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A head includes: a silicon substrate; an insulating film on the silicon substrate; an electrode wiring on the insulating film; a flexible wiring connected to the electrode wiring; and a conductive film electrically connects the flexible wiring and the electrode wiring in a bonding area. The silicon substrate has an exposed area on a surface of the silicon substrate facing the insulating film, and the exposed area is in a vicinity of the bonding area and is exposed from the insulating film.