Methods and Apparatus for Controlling RF Parameters at Multiple Frequencies

Methods and Apparatus for Controlling RF Parameters at Multiple Frequencies

A method and apparatus for controlling RF plasma attributes is disclosed. Some embodiments of the disclosure provide RF sensors within processing chambers operable at high temperatures. Some embodiments provide methods of measuring RF plasma attributes using RF sensors within a processing chamber to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Srivastava, Shailendra, Rocha, Juan Carlos, Dzilno, Dmitry A, Jorapur, Nikhil Sudhindrarao, Mukuti, Ndanka O, Ye, Zheng John, Benjamin Raj, Daemian Raj
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:A method and apparatus for controlling RF plasma attributes is disclosed. Some embodiments of the disclosure provide RF sensors within processing chambers operable at high temperatures. Some embodiments provide methods of measuring RF plasma attributes using RF sensors within a processing chamber to provide feedback control for an RF generator.