CARRIER SUBSTRATE, LAMINATE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

A carrier substrate to be used, when manufacturing a member for an electronic device on a surface of a substrate, by being bonded to the substrate, includes at least a first glass substrate. The first glass substrate has a compaction described below of 80 ppm or less. Compaction is a shrinkage in a...

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Bibliographische Detailangaben
Hauptverfasser: YAOITA, Takatoshi, AKIYAMA, Jun, EBATA, Kenichi, ONO, Kazutaka, USUI, Reo
Format: Patent
Sprache:eng
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Zusammenfassung:A carrier substrate to be used, when manufacturing a member for an electronic device on a surface of a substrate, by being bonded to the substrate, includes at least a first glass substrate. The first glass substrate has a compaction described below of 80 ppm or less. Compaction is a shrinkage in a case of subjecting the first glass substrate to a temperature raising from a room temperature at 100° C./hour and to a heat treatment at 600° C. for 80 minutes, and then to a cooling to the room temperature at 100° C./hour.