FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS

A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Constant, Andrew J, Baumgarten, Douglas B, Holeyannavar, Devendra Channappa, Ramachandraiah, Arunkumar, Rice, Michael R, Ramachandran, Narayanan, Assaf, Shay, Newman, Jacob, Reuter, Paul B, Gopalakrishna, Srinivas Poshatrahalli, Koshti, Sushant S, Phillips, David
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.