INTEGRATED DETECTOR ON FABRY-PEROT INTERFEROMETER SYSTEM

An optical sensor. The optical sensor comprises a substrate and a Fabry-Perot interferometer. The substrate is formed from a semiconductor. The Fabry-Perot interferometer comprises a first mirror and a second mirror, and is mounted on the substrate such that light is transmitted through the interfer...

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1. Verfasser: MIGUEL SÁNCHEZ, Javier
Format: Patent
Sprache:eng
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Zusammenfassung:An optical sensor. The optical sensor comprises a substrate and a Fabry-Perot interferometer. The substrate is formed from a semiconductor. The Fabry-Perot interferometer comprises a first mirror and a second mirror, and is mounted on the substrate such that light is transmitted through the interferometer to the substrate. The substrate is doped such that a region of the substrate to which light is transmitted by the interferometer forms a photodiode.