Charged Particle Beam Device

There is provided a technique capable of shortening a photographing time and obtaining a more accurate photographed image when photographing a sample SAM using a charged particle beam device 1. The charged particle beam device 1 includes an electron gun 3, an objective lens 6, a stage 8, detectors 10 and 11, an integrated control unit C0, a photographing function, and an autofocus function. Each of a plurality of photographing visual fields is focused in a focus value calculation visual field 64 adjacent to a designated visual field 61 designated as a photographing target among the plurality of photographing visual fields, and a focus value calculated in the focus value calculation visual field 64 is used for calculating focus values of each of the plurality of photographing visual fields.