OBJECT HOLDER, TOOL AND METHOD OF MANUFACTURING AN OBJECT HOLDER

An object holder configured to support an object, the object holder including: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between...

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Bibliographische Detailangaben
Hauptverfasser:	VAN BERKEL, Koos, VAN DUIVENBODE, Jeroen, ENGELEN, Johannes Bernardus Charles, NOTENBOOM, Arnoud Willem, JANSSEN, Kjeld Gertrudus Hendrikus, NIEUWENHUIS, Erik Johannes, OVERKAMP, Jim Vincent, VAN DE VEN, Bastiaan Lambertus Wilhelmus Marinus, PIJNENBURG, Johannes Adrianus Cornelis Maria
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An object holder configured to support an object, the object holder including: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers, wherein the electrostatic sheet is bonded to the core body by a bonding material having a thickness of at least 100 nm.