SEMICONDUCTOR MEMORY DEVICE
According to one embodiment, a semiconductor memory device incudes: a stacked body in which a plurality of first conductive layers and a plurality of first insulating layers are alternately stacked one by one; and a contact that extends in the stacked body in the stacking direction, and is connected...
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creator | MORI, Takeo KAWANISHI, Ayako SHIGA, Kanako |
description | According to one embodiment, a semiconductor memory device incudes: a stacked body in which a plurality of first conductive layers and a plurality of first insulating layers are alternately stacked one by one; and a contact that extends in the stacked body in the stacking direction, and is connected to a structure arranged on in the stacked body or below the stacked body. The contact includes: a second conductive layer that extends in the stacked body LM in the stacking direction, and serves as a core of the contact; and a second insulating layer that covers a sidewall of the second conductive layer, and serves as a liner of the contact. At least at a point close to the structure, when viewed in a cross section taken in a direction intersecting the stacking direction, a variation, in a circumferential direction of the contact, of a first distance from a center point of the second conductive layer to an outer edge of the second insulating layer is larger than a variation, in the circumferential direction of the contact, of a second distance from the center point to an outer edge of the second conductive layer. |
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The contact includes: a second conductive layer that extends in the stacked body LM in the stacking direction, and serves as a core of the contact; and a second insulating layer that covers a sidewall of the second conductive layer, and serves as a liner of the contact. At least at a point close to the structure, when viewed in a cross section taken in a direction intersecting the stacking direction, a variation, in a circumferential direction of the contact, of a first distance from a center point of the second conductive layer to an outer edge of the second insulating layer is larger than a variation, in the circumferential direction of the contact, of a second distance from the center point to an outer edge of the second conductive layer.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230323&DB=EPODOC&CC=US&NR=2023090711A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230323&DB=EPODOC&CC=US&NR=2023090711A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MORI, Takeo</creatorcontrib><creatorcontrib>KAWANISHI, Ayako</creatorcontrib><creatorcontrib>SHIGA, Kanako</creatorcontrib><title>SEMICONDUCTOR MEMORY DEVICE</title><description>According to one embodiment, a semiconductor memory device incudes: a stacked body in which a plurality of first conductive layers and a plurality of first insulating layers are alternately stacked one by one; and a contact that extends in the stacked body in the stacking direction, and is connected to a structure arranged on in the stacked body or below the stacked body. The contact includes: a second conductive layer that extends in the stacked body LM in the stacking direction, and serves as a core of the contact; and a second insulating layer that covers a sidewall of the second conductive layer, and serves as a liner of the contact. 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The contact includes: a second conductive layer that extends in the stacked body LM in the stacking direction, and serves as a core of the contact; and a second insulating layer that covers a sidewall of the second conductive layer, and serves as a liner of the contact. At least at a point close to the structure, when viewed in a cross section taken in a direction intersecting the stacking direction, a variation, in a circumferential direction of the contact, of a first distance from a center point of the second conductive layer to an outer edge of the second insulating layer is larger than a variation, in the circumferential direction of the contact, of a second distance from the center point to an outer edge of the second conductive layer.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | SEMICONDUCTOR MEMORY DEVICE |
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