INTEGRATED MEMS RESONATOR AND METHOD

An electronic device and associated methods are disclosed. In one example, the electronic device includes a MEMS die located within a substrate, and below a processor die. In selected examples, the MEMS die includes a resonator. Example methods of forming MEMS resonator devices are also shown.

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Bibliographische Detailangaben
Hauptverfasser:	Abdelmoneum, Mohamed A, Alban, Eduardo, Carlton, Brent R, Kurd, Nasser A, Pietambaram, Srinivas Venkata Ramanuja, Shahraini, Sarah, Mix, Jason, Ibrahim, Tarek A, Bryks, Whitney
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS RESONATORS TRANSPORTING
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Beschreibung
Zusammenfassung:	An electronic device and associated methods are disclosed. In one example, the electronic device includes a MEMS die located within a substrate, and below a processor die. In selected examples, the MEMS die includes a resonator. Example methods of forming MEMS resonator devices are also shown.