APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF OPERATING THE SAME

An apparatus for processing a substrate includes a reaction tube, a side cover, a heater, a first gas supplier, a second gas supplier and a controller. The reaction tube is configured to receive a substrate boat in which a plurality of the substrate is received to process the substrate. The side cov...

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Bibliographische Detailangaben
Hauptverfasser: PARK, Song Hwan, JIN, Yong Tak, KIM, Bo Sun, KANG, Sung Ho, KIM, Tae Hwan, YOO, Hyun Jun, KANG, Min Woong, LEE, Hong Won, CHO, Joo Hyun, JUNG, Min Jin
Format: Patent
Sprache:eng
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