CAPACITIVE PRESSURE SENSOR

A capacitive pressure sensor (1) using mutual capacitance type is provided. The capacitive pressure sensor (1) comprises a dielectric layer (2), a ground electrode (3), transmission electrodes (4), reception electrodes (5) and a controller (6). The transmission electrodes and reception electrodes ha...

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Bibliographische Detailangaben
Hauptverfasser: IMAJO, Kazuki, IDE, Satoshi, MIYAO, Fumitaka, TAKATA, Keisuke
Format: Patent
Sprache:eng
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Zusammenfassung:A capacitive pressure sensor (1) using mutual capacitance type is provided. The capacitive pressure sensor (1) comprises a dielectric layer (2), a ground electrode (3), transmission electrodes (4), reception electrodes (5) and a controller (6). The transmission electrodes and reception electrodes have a matrix structure (FIG. 3). An electric field is generated between the transmission electrodes and the reception electrodes by the controller. When the dielectric layer is deformed by a pressure applied to the ground electrode, a capacitance of the dielectric layer changes. The controller detects the unit detection area (10) where the capacitance changes and the pressure corresponding to the change in the capacitance.