DISTANCE MEASUREMENT DEVICE, DISTANCE MEASUREMENT METHOD, AND MACHINE TOOL

A distance measurement device includes: a signal acquisition unit to acquire an electric signal based on interference light from an optical sensor device that splits sweep light having a periodically changing frequency into reference light and irradiation light to be emitted toward an object to be m...

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Bibliographische Detailangaben
1. Verfasser: OHATA, Nobuo
Format: Patent
Sprache:eng
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