DISTANCE MEASUREMENT DEVICE, DISTANCE MEASUREMENT METHOD, AND MACHINE TOOL

A distance measurement device includes: a signal acquisition unit to acquire an electric signal based on interference light from an optical sensor device that splits sweep light having a periodically changing frequency into reference light and irradiation light to be emitted toward an object to be m...

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Bibliographische Detailangaben
1. Verfasser: OHATA, Nobuo
Format: Patent
Sprache:eng
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Zusammenfassung:A distance measurement device includes: a signal acquisition unit to acquire an electric signal based on interference light from an optical sensor device that splits sweep light having a periodically changing frequency into reference light and irradiation light to be emitted toward an object to be measured, irradiates the object with the irradiation light, generates interference light by causing the reference light to interfere with reflected light that is the irradiation light reflected by the object, and generates the electric signal based on the generated interference light; a frequency calculation unit to calculate, on the basis of the electric signal based on the interference light, a peak frequency of the electric signal using LASSO regression; a distance measurement unit to measure, on the basis of the peak frequency, a distance from a predetermined reference point to the object; and a distance output unit to output distance information indicating the distance.