SEMICONDUCTOR IMAGE SENSOR AND METHOD FOR FORMING THE SAME

A semiconductor image sensor includes a first substrate including a first front side and a first back side, a second substrate including a second front side and a second back side, a third substrate including a third front side and a third back side, a first interconnect structure, and a second inte...

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Hauptverfasser: JIANG, SIN-YI, LIAO, YIN-KAI, SZE, JHY-JYI, CHU, YI-SHIN, CHEN, HSIANG-LIN, HUANG, KUANIEH
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor image sensor includes a first substrate including a first front side and a first back side, a second substrate including a second front side and a second back side, a third substrate including a third front side and a third back side, a first interconnect structure, and a second interconnect structure. The first substrate includes a layer and a first light-sensing element in the layer. The layer includes a first semiconductor material, and the first light-sensing element includes a second semiconductor material. The second substrate is bonded to the first substrate with the second front side facing the first back side. The third substrate is bonded to the first substrate with the third front side facing the first front side. The first interconnect structure and the second interconnect structure are disposed between the first front side and the third front side.