SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF

A semiconductor storage device includes: a first stack having a first insulation film and a first conductive film alternately stacked in a first direction; a plurality of first column portions respectively including a first semiconductor portion extending in the first stack in the first direction an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ISHIDA, Takashi, SHIMIZU, Shun
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor storage device includes: a first stack having a first insulation film and a first conductive film alternately stacked in a first direction; a plurality of first column portions respectively including a first semiconductor portion extending in the first stack in the first direction and a charge trapping film provided on an outer circumferential surface of the first semiconductor portion; and a first isolation portion penetrating through an upper-layer portion of the first stack in the first direction, extending in a second direction that crosses the first direction, including a second insulation film and a third insulation film arranged via the second insulation film, and configured to electrically isolate the first conductive film included in the upper-layer portion of the first stack in a third direction that crosses the first and second directions.