MENISCUS MEASURING APPARATUS AND METHOD, SUBSTRATE PROCESSING APPARATUS

A meniscus measuring method capable of quickly and accurately measuring meniscus positions in a plurality of nozzles of an inkjet head can be provided. The meniscus measuring method comprises providing a head unit capable of discharging ink through a plurality of nozzles, adhering ink remaining in t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANG, Han Lim, LEE, Jae Duck, JANG, Suk Won, JIN, Won Yong
Format: Patent
Sprache:eng
Schlagworte:
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