MENISCUS MEASURING APPARATUS AND METHOD, SUBSTRATE PROCESSING APPARATUS

A meniscus measuring method capable of quickly and accurately measuring meniscus positions in a plurality of nozzles of an inkjet head can be provided. The meniscus measuring method comprises providing a head unit capable of discharging ink through a plurality of nozzles, adhering ink remaining in t...

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Bibliographische Detailangaben
Hauptverfasser: KANG, Han Lim, LEE, Jae Duck, JANG, Suk Won, JIN, Won Yong
Format: Patent
Sprache:eng
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Zusammenfassung:A meniscus measuring method capable of quickly and accurately measuring meniscus positions in a plurality of nozzles of an inkjet head can be provided. The meniscus measuring method comprises providing a head unit capable of discharging ink through a plurality of nozzles, adhering ink remaining in the plurality of nozzles to a film to form a detection pattern on the film by bringing the film into close contact with the plurality of nozzles, measuring meniscus of ink remaining in the plurality of nozzles based on the detection pattern.