MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS

A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack stru...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yow, Zhen Feng, Dorhout, Justin B, King, Matthew J, Xu, Lifang, Zhao, Bo, Park, Matthew, Zhang, Xiaosong, Reece, Jason, Tran, Tien Minh Quan, Gossman, Michael J, Kewley, David A, Ong, Biow Hiem, Peterson, Joel D, Barclay, Martin J, Olson, Adam L, Chooi, Kah Sing, Vadivel, Shruthi Kumara
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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