MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS

A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack stru...

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Bibliographische Detailangaben
Hauptverfasser: Yow, Zhen Feng, Dorhout, Justin B, King, Matthew J, Xu, Lifang, Zhao, Bo, Park, Matthew, Zhang, Xiaosong, Reece, Jason, Tran, Tien Minh Quan, Gossman, Michael J, Kewley, David A, Ong, Biow Hiem, Peterson, Joel D, Barclay, Martin J, Olson, Adam L, Chooi, Kah Sing, Vadivel, Shruthi Kumara
Format: Patent
Sprache:eng
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Zusammenfassung:A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.