MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS
A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack stru...
Gespeichert in:
| Hauptverfasser: | , , , , , , , , , , , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | Yow, Zhen Feng Dorhout, Justin B King, Matthew J Xu, Lifang Zhao, Bo Park, Matthew Zhang, Xiaosong Reece, Jason Tran, Tien Minh Quan Gossman, Michael J Kewley, David A Ong, Biow Hiem Peterson, Joel D Barclay, Martin J Olson, Adam L Chooi, Kah Sing Vadivel, Shruthi Kumara |
| description | A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2023063178A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2023063178A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2023063178A13</originalsourceid><addsrcrecordid>eNqNi70KwjAURrM4iPoOAVeFtgF1DTdXG8iP5CaCUyklTqKF-v4YxMHR5ZzhO9-cDVZD8GgQYvBOA1d40YDEtQOTlHYnTlHqUIjngpAgpoC04dIpHtDIiIr__OlaSkuf2WJsvaIlm936-5RXXy_Y-ogR2m0en12exn7Ij_zqEjVVI6qdqPcHWYv_qjck7zWK</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS</title><source>esp@cenet</source><creator>Yow, Zhen Feng ; Dorhout, Justin B ; King, Matthew J ; Xu, Lifang ; Zhao, Bo ; Park, Matthew ; Zhang, Xiaosong ; Reece, Jason ; Tran, Tien Minh Quan ; Gossman, Michael J ; Kewley, David A ; Ong, Biow Hiem ; Peterson, Joel D ; Barclay, Martin J ; Olson, Adam L ; Chooi, Kah Sing ; Vadivel, Shruthi Kumara</creator><creatorcontrib>Yow, Zhen Feng ; Dorhout, Justin B ; King, Matthew J ; Xu, Lifang ; Zhao, Bo ; Park, Matthew ; Zhang, Xiaosong ; Reece, Jason ; Tran, Tien Minh Quan ; Gossman, Michael J ; Kewley, David A ; Ong, Biow Hiem ; Peterson, Joel D ; Barclay, Martin J ; Olson, Adam L ; Chooi, Kah Sing ; Vadivel, Shruthi Kumara</creatorcontrib><description>A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230302&DB=EPODOC&CC=US&NR=2023063178A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230302&DB=EPODOC&CC=US&NR=2023063178A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Yow, Zhen Feng</creatorcontrib><creatorcontrib>Dorhout, Justin B</creatorcontrib><creatorcontrib>King, Matthew J</creatorcontrib><creatorcontrib>Xu, Lifang</creatorcontrib><creatorcontrib>Zhao, Bo</creatorcontrib><creatorcontrib>Park, Matthew</creatorcontrib><creatorcontrib>Zhang, Xiaosong</creatorcontrib><creatorcontrib>Reece, Jason</creatorcontrib><creatorcontrib>Tran, Tien Minh Quan</creatorcontrib><creatorcontrib>Gossman, Michael J</creatorcontrib><creatorcontrib>Kewley, David A</creatorcontrib><creatorcontrib>Ong, Biow Hiem</creatorcontrib><creatorcontrib>Peterson, Joel D</creatorcontrib><creatorcontrib>Barclay, Martin J</creatorcontrib><creatorcontrib>Olson, Adam L</creatorcontrib><creatorcontrib>Chooi, Kah Sing</creatorcontrib><creatorcontrib>Vadivel, Shruthi Kumara</creatorcontrib><title>MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS</title><description>A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNi70KwjAURrM4iPoOAVeFtgF1DTdXG8iP5CaCUyklTqKF-v4YxMHR5ZzhO9-cDVZD8GgQYvBOA1d40YDEtQOTlHYnTlHqUIjngpAgpoC04dIpHtDIiIr__OlaSkuf2WJsvaIlm936-5RXXy_Y-ogR2m0en12exn7Ij_zqEjVVI6qdqPcHWYv_qjck7zWK</recordid><startdate>20230302</startdate><enddate>20230302</enddate><creator>Yow, Zhen Feng</creator><creator>Dorhout, Justin B</creator><creator>King, Matthew J</creator><creator>Xu, Lifang</creator><creator>Zhao, Bo</creator><creator>Park, Matthew</creator><creator>Zhang, Xiaosong</creator><creator>Reece, Jason</creator><creator>Tran, Tien Minh Quan</creator><creator>Gossman, Michael J</creator><creator>Kewley, David A</creator><creator>Ong, Biow Hiem</creator><creator>Peterson, Joel D</creator><creator>Barclay, Martin J</creator><creator>Olson, Adam L</creator><creator>Chooi, Kah Sing</creator><creator>Vadivel, Shruthi Kumara</creator><scope>EVB</scope></search><sort><creationdate>20230302</creationdate><title>MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS</title><author>Yow, Zhen Feng ; Dorhout, Justin B ; King, Matthew J ; Xu, Lifang ; Zhao, Bo ; Park, Matthew ; Zhang, Xiaosong ; Reece, Jason ; Tran, Tien Minh Quan ; Gossman, Michael J ; Kewley, David A ; Ong, Biow Hiem ; Peterson, Joel D ; Barclay, Martin J ; Olson, Adam L ; Chooi, Kah Sing ; Vadivel, Shruthi Kumara</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2023063178A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>Yow, Zhen Feng</creatorcontrib><creatorcontrib>Dorhout, Justin B</creatorcontrib><creatorcontrib>King, Matthew J</creatorcontrib><creatorcontrib>Xu, Lifang</creatorcontrib><creatorcontrib>Zhao, Bo</creatorcontrib><creatorcontrib>Park, Matthew</creatorcontrib><creatorcontrib>Zhang, Xiaosong</creatorcontrib><creatorcontrib>Reece, Jason</creatorcontrib><creatorcontrib>Tran, Tien Minh Quan</creatorcontrib><creatorcontrib>Gossman, Michael J</creatorcontrib><creatorcontrib>Kewley, David A</creatorcontrib><creatorcontrib>Ong, Biow Hiem</creatorcontrib><creatorcontrib>Peterson, Joel D</creatorcontrib><creatorcontrib>Barclay, Martin J</creatorcontrib><creatorcontrib>Olson, Adam L</creatorcontrib><creatorcontrib>Chooi, Kah Sing</creatorcontrib><creatorcontrib>Vadivel, Shruthi Kumara</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Yow, Zhen Feng</au><au>Dorhout, Justin B</au><au>King, Matthew J</au><au>Xu, Lifang</au><au>Zhao, Bo</au><au>Park, Matthew</au><au>Zhang, Xiaosong</au><au>Reece, Jason</au><au>Tran, Tien Minh Quan</au><au>Gossman, Michael J</au><au>Kewley, David A</au><au>Ong, Biow Hiem</au><au>Peterson, Joel D</au><au>Barclay, Martin J</au><au>Olson, Adam L</au><au>Chooi, Kah Sing</au><au>Vadivel, Shruthi Kumara</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS</title><date>2023-03-02</date><risdate>2023</risdate><abstract>A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US2023063178A1 |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-26T06%3A37%3A10IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Yow,%20Zhen%20Feng&rft.date=2023-03-02&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2023063178A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |