SUBSTRATE SUPPORTING UNIT AND A SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME

SUBSTRATE SUPPORTING UNIT AND A SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME

A substrate processing device capable of preventing deformation of a substrate during a process includes a substrate supporting unit having a contact surface that comes into contact with an edge of a substrate to be processed, wherein the substrate supporting unit includes a protruding (e.g. embosse...

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Bibliographische Detailangaben
Hauptverfasser: Kwon, HakYong, Kim, JongSu, Kim, SungBae, Park, JuHyuk, Lee, SeungHwan
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A substrate processing device capable of preventing deformation of a substrate during a process includes a substrate supporting unit having a contact surface that comes into contact with an edge of a substrate to be processed, wherein the substrate supporting unit includes a protruding (e.g. embossed) structure protruding from a base to support deformation from the inside of the edge of the substrate to be processed.