METHOD AND DEVICE FOR CORRECTING A TELECENTRICITY ERROR OF AN IMAGING DEVICE

The invention relates to a method for correcting a telecentricity error of an imaging device for semiconductor lithography having an illumination unit, an imaging optical unit, and a filter for correcting the telecentricity error, having the following method steps:determining the telecentricity erro...

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Bibliographische Detailangaben
Hauptverfasser:	Hetzler, Jochen, Toepfer, Susanne
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The invention relates to a method for correcting a telecentricity error of an imaging device for semiconductor lithography having an illumination unit, an imaging optical unit, and a filter for correcting the telecentricity error, having the following method steps:determining the telecentricity error of the imaging device,designing a filter for correcting the telecentricity error,arranging the filter in the pupil plane of the illumination unit,determining the telecentricity error again, andrepeating the method steps one to four until the telecentricity error falls below a specified telecentricity error.The invention furthermore relates to an imaging device for semiconductor lithography, which is configured for carrying out the method.