SENSOR DEVICE

A sensor device according to the present disclosure includes: a Peltier element; a sensor element thermally connected to a cooling surface of the Peltier element; and a package substrate that is made of ceramic, is thermally connected to a heat dissipation surface of the Peltier element, and accommo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAGUCHI, Kenichi, WAKABAYASHI, Takahiro
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A sensor device according to the present disclosure includes: a Peltier element; a sensor element thermally connected to a cooling surface of the Peltier element; and a package substrate that is made of ceramic, is thermally connected to a heat dissipation surface of the Peltier element, and accommodates the Peltier element and the sensor element.