Method for Measuring Dimensions Relative to Bounded Object

A method for analyzing at least one bounded object in an electron microscope image that includes segmenting the image to provide a segmented image and measuring a dimension relative to the at least one bounded object in the segmented image. The electron microscope image can be an image of a semicond...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Iskakov, Almambet, Kim, Hyung Nun, Kalidindi, Srinivasa R
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A method for analyzing at least one bounded object in an electron microscope image that includes segmenting the image to provide a segmented image and measuring a dimension relative to the at least one bounded object in the segmented image. The electron microscope image can be an image of a semiconductor device that includes a pattern of bounded objects or structure of the semiconductor device.