Vibrator Device, Oscillator, Gyro Sensor, Electronic Apparatus, And Vehicle

A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OTSUKI, Tetsuya, IDE, Tsugio
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.