MEASURING DEVICE AND MEASURING METHOD

MEASURING DEVICE AND MEASURING METHOD

A measurement apparatus (100) includes a laser light source (11), a beep splitter (121), an optical path converter (122), and a light reception unit (111). The beep splitter (121) branches laser light emitted from the laser light source (11) into first branch light and second branch light and irradi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ARATAKE, Atsushi, IKEGUCHI, Yuta, NAKAGAWA, Masafumi, KOBAYASHI, Daiki
Format: Patent
Sprache:eng
Schlagworte:
MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A measurement apparatus (100) includes a laser light source (11), a beep splitter (121), an optical path converter (122), and a light reception unit (111). The beep splitter (121) branches laser light emitted from the laser light source (11) into first branch light and second branch light and irradiates a target object (1) with the first branch light. The optical path converter (122) converts a direction of the second branch light to a direction in which a structure (2) is irradiated with the second branch light and irradiates the structure (2) with the second branch light. The light reception unit (111) receives first reflected light obtained in a manner that the first branch light is reflected by the target object (1) and second reflected light obtained in a manner that the second branch light is reflected by the structure (2).