SEMICONDUCTOR DEVICE

A semiconductor device is provided. The semiconductor device includes a first stacked structure including a plurality of first insulating patterns and a plurality of first semiconductor patterns alternately stacked on a substrate, the first stacked structure extending in a first direction parallel t...

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Bibliographische Detailangaben
Hauptverfasser: HONG, Jae Ho, LEE, Kyung Hwan, KIM, Hui-Jung, KIM, Yong Seok, HWANG, Yoo Sang, YAMADA, Satoru, PARK, Seok Han
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device is provided. The semiconductor device includes a first stacked structure including a plurality of first insulating patterns and a plurality of first semiconductor patterns alternately stacked on a substrate, the first stacked structure extending in a first direction parallel to an upper surface of the substrate, a first conductive pattern on one side surface of the first stacked structure, the first conductive pattern extending in a second direction crossing the upper surface of the substrate, and a first ferroelectric layer between the first stacked structure and the first conductive pattern, the first ferroelectric layer extending in the second direction, wherein each of the first semiconductor patterns includes a first impurity region, a first channel region and a second impurity region which are sequentially arranged along the first direction.