DEVICE FOR DRYING SEMICONDUCTOR SUBSTRATES

A device is for drying disc-shaped substrates. The device has an elongated body, which tapers upwards to form a wedge having an angle α between two upper surfaces and an upper edge. The upper edge is configured to support a disc-shaped substrate. An upper surface of the two upper surfaces has a groo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Rothenaicher, Simon, Geissler, Sebastian
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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