SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES

Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membra...

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Bibliographische Detailangaben
Hauptverfasser:	Dirksen, Peter, Shulepov, Sergei, Timmermans, Petrus Henricus Maria, Loebl, Hans-Peter, Budzelaar, Franciscus Paulus Maria, de Wild, Nico Maris Adriaan
Format:	Patent
Sprache:	eng
Schlagworte:	AXLES FOR WHEELS OR CASTORS CASTORS FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL INCREASING WHEEL ADHESION INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING VEHICLE WHEELS VEHICLES IN GENERAL
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Beschreibung
Zusammenfassung:	Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane.