OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

An optical measurement apparatus includes a light source unit generating and outputting light, a polarized light generating unit generating polarized light from the light, an optical system generating a pupil image of a measurement target, using the polarized light, a self-interference generating un...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, Jin Yong, JANG, Sung Ho, LEE, Myung Jun, HAN, Dae Hoon, PARK, Gwang Sik, KIM, Wook Rae
Format:	Patent
Sprache:	eng
Schlagworte:	DIAGNOSIS HUMAN NECESSITIES HYGIENE IDENTIFICATION MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEDICAL OR VETERINARY SCIENCE PHYSICS SURGERY TESTING
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Beschreibung
Zusammenfassung:	An optical measurement apparatus includes a light source unit generating and outputting light, a polarized light generating unit generating polarized light from the light, an optical system generating a pupil image of a measurement target, using the polarized light, a self-interference generating unit generating multiple beams that are split from the pupil image, and a detecting unit detecting a self-interference image generated by interference of the multiple beams with each other.