SEMICONDUCTOR MEMORY DEVICE AND APPARATUS INCLUDING THE SAME

A semiconductor memory device and a device including the same are provided. The semiconductor memory device includes word lines extending in a first direction on a semiconductor substrate; bit line structures extending across the word lines in a second direction crossing the first direction; contact...

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Bibliographische Detailangaben
Hauptverfasser: LEE, Changseok, SHIN, Hyeonsuk, LEE, Minhyun, HONG, Seokmo, BYUN, Kyung-Eun, SHIN, Hyeonjin
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor memory device and a device including the same are provided. The semiconductor memory device includes word lines extending in a first direction on a semiconductor substrate; bit line structures extending across the word lines in a second direction crossing the first direction; contact pad structures between the word lines and between the bit line structures; and spacers between the bit line structures and the contact pad structures. The spacers include a boron nitride layer.