SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES

In one example, an electronic device comprises a cavity substrate comprising a substrate base comprising a top side and a bottom side and a cavity wall over the substrate base and defining a cavity, an electronic component over the substrate base and in the cavity, a lid comprising a top side and a...

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Bibliographische Detailangaben
Hauptverfasser: Ryu, Jin Seok, Kim, Woo Jun, Oh, Kwang Seok, Kim, Seung Mo, Han, Yi Seul, Lu, Weilung, Jang, Chang Uk, Yu, Seung Jae, Arcedera, Adrian, Ryu, Kyung Han, Lee, Tae Yong
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In one example, an electronic device comprises a cavity substrate comprising a substrate base comprising a top side and a bottom side and a cavity wall over the substrate base and defining a cavity, an electronic component over the substrate base and in the cavity, a lid comprising a top side and a bottom side, wherein the lid is over the substrate base and the cavity wall to define an interior of the cavity and an exterior of the cavity, an adhesive between the bottom side of the lid and a top side of the cavity wall, and a vent seal between the interior of the cavity and the exterior of the cavity. Other examples and related methods are also disclosed herein.