MEMORY WITH OPTIMIZED RESISTIVE LAYERS

A memory system may include separate amounts or types of resistive material that may be deposited over memory cells and conductive vias using separate resistive layers in the access lines. A first resistive material layer may be deposited over the memory cells prior to performing an array terminatio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Barton, Adam Thomas, Ege, Efe Sinan, Zheng, Pengyuan, Baker, Kevin Lee, Venigalla, Rajasekhar, Wei, Lei
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A memory system may include separate amounts or types of resistive material that may be deposited over memory cells and conductive vias using separate resistive layers in the access lines. A first resistive material layer may be deposited over the memory cells prior to performing an array termination etch used to deposit the conductive via. The array termination etch may remove the first resistive material over the portion of the array used to deposit the conductive via. A second resistive material layer may be deposited after the etch has occurred and the conductive via has been formed. The second resistive material layer may be deposited over the conductive via.