PASSIVE COMPONENT Q FACTOR ENHANCEMENT WITH ELEVATED RESISTANCE REGION OF SUBSTRATE

PASSIVE COMPONENT Q FACTOR ENHANCEMENT WITH ELEVATED RESISTANCE REGION OF SUBSTRATE

An integrated circuit (IC) includes a semiconductor substrate and an interconnect region. The semiconductor substrate has a first surface and a second surface opposite the first surface. The semiconductor substrate has a first region with a passive component. The semiconductor substrate has a second...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUMMERFELT, Scott Robert, SANKARAN, Swaminathan, COOK, Benjamin
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An integrated circuit (IC) includes a semiconductor substrate and an interconnect region. The semiconductor substrate has a first surface and a second surface opposite the first surface. The semiconductor substrate has a first region with a passive component. The semiconductor substrate has a second region outside the first region. The resistance of the second region is smaller than the resistance of the first region. The interconnection region is on the second surface of the semiconductor substrate.