FABRICATING METHOD FOR WAFER LEVEL SEMICONDUCTOR PACKAGE DEVICE AND THE FABRICATED SEMICONDUCTOR PACKAGE DEVICE

The invention describes a fabricating method for fabricating semiconductor package device which includes the following steps: providing a wafer having a plurality of dies, wherein each of the dies is provided on a top surface thereof with a middle electric conducting structure and a solder ball; for...

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Bibliographische Detailangaben
Hauptverfasser: Li, Chi-Hsueh, Ho, Chung-Hsiung, Chang, Chih-Hung
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention describes a fabricating method for fabricating semiconductor package device which includes the following steps: providing a wafer having a plurality of dies, wherein each of the dies is provided on a top surface thereof with a middle electric conducting structure and a solder ball; forming a molding structure having a flat top surface on a top side of the wafer; removing a part of the molding structure and exposing a part of each of the solder ball by plasma etching; performing a dicing process along a boundary of each of the dies to separate each of the dies so that the semiconductor package device is thus obtained.