CHARGE CARRIER GENERATION SOURCE

A carrier generation source is provided, comprising a carrier generation area configured to provide carriers and a grid electrode, the grid electrode comprising an electrically conductive carrier, the carrier having a first side and a second side opposite the first side, the first side being directl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Nestler, Matthias, Loos, Enrico
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A carrier generation source is provided, comprising a carrier generation area configured to provide carriers and a grid electrode, the grid electrode comprising an electrically conductive carrier, the carrier having a first side and a second side opposite the first side, the first side being directly adjacent the carrier generation area, the carrier having a plurality of through-holes extending from the first side through the carrier to the second side, the through-holes on the first side each having a first opening surface and the through-holes on the second side having a second opening surface, the first opening surface being larger than the second opening surface.