ELECTRON GUN AND ELECTRON MICROSCOPE

The electron gun is provided with a first anode electrode and a second anode electrode to generate an acceleration and deceleration electric field. A lens electric field makes it possible to irradiate a sample with an electron beam emitted from a part outside an optical axis of the photoelectric fil...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OHSHIMA, Takashi, OSE, Yoichi, MORISHITA, Hideo, KATANE, Junichi, KOHMU, Naohiro, IDE, Tatsuro, AGEMURA, Toshihide
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The electron gun is provided with a first anode electrode and a second anode electrode to generate an acceleration and deceleration electric field. A lens electric field makes it possible to irradiate a sample with an electron beam emitted from a part outside an optical axis of the photoelectric film without being blocked by a differential exhaust diaphragm. A wide range of electron beams off-optical axis can be used even in a high-brightness photocathode that requires high vacuum. As a result, the photoelectric film and the electron gun can be extended in life, can be stabilized, and can be increased in brightness. Further, it is possible to facilitate a control of emitting electron beams from a plurality of positions on the photoelectric film, a timing control of emitting electron beams from a plurality of positions, a condition control of an electron beam in an electron microscope using electron beams.