MACHINE LEARNING BASED AUTOMATIC ROUTING METHOD AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT

MACHINE LEARNING BASED AUTOMATIC ROUTING METHOD AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT

The present disclosure relates to a machine learning-based automatic routing method and apparatus for semiconductor equipment, and the machine learning-based automatic routing method for semiconductor equipment according to one embodiment of the present disclosure includes: a first operation of disp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: LIM, Tae hwa
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Beschreibung
Zusammenfassung:The present disclosure relates to a machine learning-based automatic routing method and apparatus for semiconductor equipment, and the machine learning-based automatic routing method for semiconductor equipment according to one embodiment of the present disclosure includes: a first operation of disposing semiconductor equipment and ancillary equipment; a second operation of recognizing connection points (points of connection, POC) which are three-dimensional (3D) coordinates of the semiconductor equipment and the ancillary equipment; and a third operation of generating an optimal path which connects the connection points (POC) using a machine learning algorithm.