CERAMIC HEATER AND METHOD OF MANUFACTURING THE CERAMIC HEATER

A method of manufacturing a ceramic heater, the method includes the steps of: (a) forming, on a surface of a first ceramic fired layer or an unfired layer, a resistance heating element or its precursor in a predetermined pattern; (b) forming a recessed groove along a longitudinal direction by radiat...

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Bibliographische Detailangaben
Hauptverfasser:	HIRATA, Natsuki, AKAO, Takayoshi
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY
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Beschreibung
Zusammenfassung:	A method of manufacturing a ceramic heater, the method includes the steps of: (a) forming, on a surface of a first ceramic fired layer or an unfired layer, a resistance heating element or its precursor in a predetermined pattern; (b) forming a recessed groove along a longitudinal direction by radiating laser light to the resistance heating element or its precursor; (c) obtaining a layered body by disposing a second ceramic unfired layer on the surface of the first ceramic fired layer or the unfired layer; and (d) obtaining the ceramic heater in which the resistance heating element is embedded in a ceramic substrate by performing hot press firing on the layered body, wherein, in the step (b), the recessed groove is formed such that a side wall surface of the recessed groove is inclined relative to the surface of the first ceramic fired layer or the unfired layer.