COATING DEVICE, COATING METHOD, AND METHOD FOR MANUFACTURING PHOTOCONDUCTOR

A coating device includes: a coating liquid holding part that is provided with an upper opening portion and a lower opening portion and holds a coating liquid, and in which a cylindrical body penetrates the upper opening portion and the lower opening portion, and the cylindrical body is relatively m...

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Hauptverfasser: SASAKI, Takaakira, NAKAMURA, Akihiko
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NAKAMURA, Akihiko
description A coating device includes: a coating liquid holding part that is provided with an upper opening portion and a lower opening portion and holds a coating liquid, and in which a cylindrical body penetrates the upper opening portion and the lower opening portion, and the cylindrical body is relatively moved to an upper side in an up-down direction, so that the coating liquid is applied to an outer peripheral surface of the cylindrical body; a container that accommodates the coating liquid that flows down; a circulation part that circulates the coating liquid in the container to the coating liquid holding part; and a receiving member that is disposed above a liquid level of the coating liquid in the container and receives the coating liquid flowing downward along the outer peripheral surface of the cylindrical body with an inclined surface.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title COATING DEVICE, COATING METHOD, AND METHOD FOR MANUFACTURING PHOTOCONDUCTOR
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