COATING DEVICE, COATING METHOD, AND METHOD FOR MANUFACTURING PHOTOCONDUCTOR

A coating device includes: a coating liquid holding part that is provided with an upper opening portion and a lower opening portion and holds a coating liquid, and in which a cylindrical body penetrates the upper opening portion and the lower opening portion, and the cylindrical body is relatively m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SASAKI, Takaakira, NAKAMURA, Akihiko
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A coating device includes: a coating liquid holding part that is provided with an upper opening portion and a lower opening portion and holds a coating liquid, and in which a cylindrical body penetrates the upper opening portion and the lower opening portion, and the cylindrical body is relatively moved to an upper side in an up-down direction, so that the coating liquid is applied to an outer peripheral surface of the cylindrical body; a container that accommodates the coating liquid that flows down; a circulation part that circulates the coating liquid in the container to the coating liquid holding part; and a receiving member that is disposed above a liquid level of the coating liquid in the container and receives the coating liquid flowing downward along the outer peripheral surface of the cylindrical body with an inclined surface.