POWER SOURCE ISOLATION CIRCUITS FOR HEATER ELEMENTS OF SUBSTRATE SUPPORTS OF SUBSTRATE PROCESSING SYSTEMS

A substrate processing system includes a substrate support and a power supply circuit. The substrate support is configured to support a substrate, wherein the substrate support comprises one or more heating elements. The power supply circuit includes: a direct current-to-alternating current converte...

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Bibliographische Detailangaben
Hauptverfasser:	BURKHART, Vincent, LEESER, Karl Frederick
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS BASIC ELECTRIC ELEMENTS CONTROL OR REGULATION THEREOF CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A substrate processing system includes a substrate support and a power supply circuit. The substrate support is configured to support a substrate, wherein the substrate support comprises one or more heating elements. The power supply circuit includes: a direct current-to-alternating current converter configured to convert a first direct current voltage to a first alternating current voltage, where the direct current-to-alternating current converter comprises at least one switch; and an isolation circuit comprising one of a coupled inductor or a transformer. The one of the coupled inductor or the transformer is configured to convert the first alternating current voltage to and second alternating current voltage and isolate the one or more heating elements from an earth ground. The power supply circuit is configured to provide an output voltage to the one or more heating elements based on the second alternating current voltage.