SYNTHETIC QUARTZ GLASS CAVITY MEMBER, SYNTHETIC QUARTZ GLASS CAVITY LID, OPTICAL DEVICE PACKAGE, AND MAKING METHODS

A synthetic quartz glass cavity member (1) is bonded to a substrate (6) having an optical device (7) mounted thereon such that the device may be accommodated in the cavity member. The cavity member (1) has an inside surface consisting of a top surface (2a) opposed to the device (7) and a side surfac...

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Bibliographische Detailangaben
Hauptverfasser: Harada, Daijitsu, Matsui, Harunobu, TAKEUCHI, Masaki, OKAFUJI, Daiyu, YAMAZAKI, Hiroyuki
Format: Patent
Sprache:eng
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Zusammenfassung:A synthetic quartz glass cavity member (1) is bonded to a substrate (6) having an optical device (7) mounted thereon such that the device may be accommodated in the cavity member. The cavity member (1) has an inside surface consisting of a top surface (2a) opposed to the device (7) and a side surface (3a). The top surface (2a) is a mirror surface and the side surface (3a) is a rough surface.